Glovebox-integrated ALD for controlled atmosphere deposition (less than 1ppm O2 & H2O)
New capabilities for Al2O3 and HfO2 thin film deposition
Enables precise layering and composite structure creation
Research Opportunities:
Creation of ultrathin Al2O3 and HfO2 films and their composites
Studies on Al2O3/HfO2
Investigation of electrical properties of high-k dielectric materials
Potential Applications:
High-density capacitor fabrication for advanced electronics
Exploration of ferroelectric properties in doped HfO2 films
Development of novel gate dielectrics for semiconductor and/or 2D devices
Next Steps:
Introductory workshops will be held to familiarize researchers with the system’s capabilities and the new materials.
The facility is now accepting research proposals that leverage these new deposition capabilities.
We encourage collaborative projects to explore the full potential of Al2O3 and HfO2 in various applications.
This new ALD system represents a significant advancement in STnano research infrastructure, positioning us at the forefront of materials science and nanotechnology research. For more information, training sessions, or to discuss potential research projects, please contact STnano facility manager
This work has benefited from the government grant Program PEPR-Spin, project SPINMAT, operated by the French National Research Agency as part of the France 2030 program, reference « ANR-22-EXSP-0007»
The sputtering chamber, directly connected to one of the two PLD chambers, enables successive depositions without intermediate venting. The sputtering system, assembled by the platform team, was custom-built to fit perfectly with the PLD configuration. It is equipped with a 2” DC magnetron, enabling, among other things, the deposition of metallic materials (platinum, copper, etc…) which, combined with the functional oxides developed by the “thin-film oxides” team, allows studies in the field of spintronics.
Laser heating of the sample holder
The platform has also improved the heating of the pulsed laser deposited samples. In addition to the existing resistive heating system, a new laser heating system has been installed. This new heating system heats the back of the sample holder using a laser (class 4) with a wavelength of 980 nm. The temperature is measured at the rear with a pyrometer. With this new device higher temperatures can be reached (at least 1100°C compared to 900°C for the resistive heating). Temperature changes can be more rapid, and annealing in an oxygen atmosphere is feasible, since laser heating eliminates issues like thermal inertia and contact oxidation.
For more information on these two new pieces of equipment, jointly funded by PEPR SPIN, CNRS, IPCMS and the “Thin-Film Oxides” team, please contact one of the PLD platform members.
Platinum deposition in the sputtering chamber located between the PLD chamber and the loadlock.
The Lumensium project, led by Nicolas del Giudice and Laurent Douce, researchers in the Organic Materials Department at the Institut de Physique et Chimie des Matériaux de Strasbourg (CNRS/Université de Strasbourg), is proposing an innovative crystalline organic scintillator capable of detecting neutrons at all energies and discriminating them from gamma rays. This new material will replace Helium(3), a material in tension currently used as standard detectors for neutron detection, while being more efficient and versatile.
Thank you to the lab staff who took part in the day and helped to make it a success.
Charles Hirlimann’s lecture on lasers was much appreciated and filled the auditorium.
The afternoon connected to the national event organized by SFP was a convivial moment. IPCMS distinguished itself by winning the live quiz and 2 of the pre-event games.
This equipment, unique in Alsace, will allow researchers to design all kinds of heterostructures based on thin films with nanometric precision. In a high vacuum environment, the acceleration of Argon atoms allows the etching of thin films with a controlled rate. Also, equipped with an in situ diagnostic tool of the material etched from the substrate (SIMS), it is thus possible to obtain an ideal control of the etching. The system is equipped with a second chamber that will allow the deposition of thin oxide layers by sputtering without the need to vent the sample after etching. This new tool completes the portfolio of processes available at STnano and will allow for new advances in fields such as spintronics, nanomagnetism, unconventional electronic devices, and nanosciences in general.
This equipment was acquired within the framework of the regional project RANGE thanks to the support of the Grand EST Region, the ITI Qmat, Unistra and CNRS
This software is designed to handle million of atoms large systems, offers the possibility to encode video of the 3D window, and regroups several tools to design atomic-scale materials: advanced crystal builder, surface creation and passivation tool … and many more !
Atomes is developed by Dr. Sébastien Le Roux, research engineer for the CNRS, who works at the Institut de Physique et Chimie des Matériaux de Strasbourg, in the Department of Organic Materials
In the current health context, we would like to reiterate the importance to apply preventive measures, particularly during gatherings. Wearing a mask is mandatory at all times during meetings and strongly recommended within the laboratory.
In the latest issue of Journal du CNRS, you can read an article on the NanoCar Race II. Anna Roslawska and Guillaume Schull (DSI – STM) will be part of the Strasbourg team, StrasNanoCar team, which will take part in this competition.
Several IPCMS teams will be involved during these days:
IPCMS will be represented, under a marquee, with 2 themes: “Travel through matter” (MET team) and “Project” Euronanomed Theraget “: new solutions for health (Sylvie Bégin team)
Visits in the lab proposed for schoolchildren on Friday October 1 and for the general public on Saturday October 2 and Sunday October 3. See details here.
